RecordDetails

Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.

Call Number

621.381531 M6265 2007

Publication

Boca Raton : CRC Press, c2007.

Description

848 p. : ill. ; 27 cm.

Multimedia

http://www.loc.gov/catdir/toc/ecip071/2006031516.html

Multimedia

http://www.loc.gov/catdir/enhancements/fy0701/2006031516-d.html


Call number: ‪621.381531 ‪M6265 2007
other author: ‪Suzuki, Kazuaki.
other author: ‪Smith, Bruce W., ‪1959-
Title: ‪Microlithography : ‪science and technology / ‪edited by Kazuaki Suzuki, Bruce W. Smith.
Publisher: ‪Boca Raton : ‪CRC Press, ‪c2007.
Description: ‪848 p. : ‪ill. ; ‪27 cm.
Subject: ‪Microlithography -- ‪Industrial applications.
Other Subject: ‪Integrated circuits -- ‪Masks.
Other Subject: ‪Metal oxide semiconductors, Complementary -- ‪Design and construction.
Other Subject: ‪Manufacturing processes.
Multimedia: http://www.loc.gov/catdir/toc/ecip071/2006031516.html
Other Multimedia: http://www.loc.gov/catdir/enhancements/fy0701/2006031516-d.html
ISBN: ‪9780824790240 (alk. paper)
Other ISBN: ‪0824790243 (hbk. : alk. paper)