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Laser-Assisted Microtechnology / Simeon M. Metev, Vadim P. Veiko. Metev, Simeon M.

Call Number

621.3815'2'028

Publication

Berlin : Springer, 1998.

Description

xii, 270p. : Figures ; 23cm.

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Full Details


Call number: ‪621.3815'2'028
Author: ‪Metev, Simeon M.
other author: ‪Veiko, Vadim P.
Title: ‪Laser-Assisted Microtechnology / ‪Simeon M. Metev, Vadim P. Veiko.
Publisher: ‪Berlin : ‪Springer, ‪1998.
Description: ‪xii, 270p. : ‪Figures ; ‪23cm.
Subject: ‪Electronic industries -- ‪Technological innovations
Other Subject: ‪Lasers -- ‪Industrial applications
Other Subject: ‪Manufacturing processes
Other Subject: ‪Electronic circuit design
Other Subject: ‪Thin film devices -- ‪Design and construction
ISBN: ‪354063973X(Hbk.)