RecordDetails

Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications / Edited by Werner Kern.

Call Number

621.38152

Publication

New Jersey : Noyes, 1993.

Description

xx, 623p. : Fig., Tab. ; 24cm.


Call number: ‪621.38152
other author: ‪Kern, Werner, ‪1925-,
Title: ‪Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications / ‪Edited by Werner Kern.
Publisher: ‪New Jersey : ‪Noyes, ‪1993.
Description: ‪xx, 623p. : ‪Fig., Tab. ; ‪24cm.
Subject: ‪Semiconductor wafers -- ‪Cleaning
ISBN: ‪0815513313(Hbk.)